Department of Electronic and Telecommunication Engineering

ENTC

A workshop on C-MOS transistor fabrication at Hiroshima university, Japan.

Written by Damith Kandage.

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As a part of an initiative to promote mutual understanding between Hiroshima University, Japan and University of Moratuwa, five students in their final year of study at Department of Electronic and Telecommunication Engineering were given the opportunity to participate in an all-expenses paid 7-day workshop on complementary metal-oxide semiconductor (CMOS) Transistor Fabrication at Research Institute for Nano-device and Bio Systems of Hiroshima University. In addition to the students from Sri Lanka 13 students from other Japanese Institutes participated in this program. The program was held from 31st of July 2017 to 6th of August 2017.
During the program students got the rare opportunity to witness the full fabrication process of CMOS transistors, from semiconductor doping to metal interconnect creation. This was carried out inside a Class 10 super cleanroom, which is a highly controlled uncontaminated environment virtually free of dust particles, to ensure a high success rate of the procedure. The students designed their own circuits and were involved in most of the steps in fabrication making this experience a first for a set of Sri Lankan undergraduates.


On the first day of training the students designed circuits which they would fabricate and test over the remaining days of training. Each student was allocated a 1mm2 area on which to design their circuits. Special emphasis was given to designing CMOS circuits, as for the first time in the program’s history, CMOS fabrication was to be carried out. Over the next three days students got the opportunity to visit the Class 10 super cleanroom and experience first-hand mask lithography, visual inspection of Silicon wafer for defects, etching, doping and metal interconnect formation. On the final two days of the workshop newly fabricated designs were tested for electrical characteristics. Afterwards a presentation of results and discussion was held with the participation of Prof. Shin Yokoyama, Director of Research Institute for Nano-device and Bio Systems.


This workshop is annually offered to a group of foreign students by Hiroshima University and it is the first time where Sri Lankan students participated with the coordination of Mr. Milantha De Silva who is currently a PhD candidate of Research Institute for Nano-device and Bio Systems, Hiroshima University and senior lecturer Dr. Tharaka Samarasingha of University of Moratuwa.


Students
• Ashen Ekanayake
• Sasindu Wijeratne
• Gajalakshan Balakrishnar
• Omega Gamage
• Hasitha Algewatta